TY  - JOUR

T1  - Site-specific dopant profiling in a scanning electron microscope using focused ion beam prepared specimens

JO  - APPL PHYS LETT

PY  - 2006/05/22

AU  - Kazemian P

AU  - Twitchett AC

AU  - Humphreys CJ

AU  - Rodenburg C

ED  - 

DO  - DOI: 10.1063/1.2207552

VL  - 88

IS  - 21

Y2  - 2025/03/15

ER  -