@article{article, title = {{Effect of experimental parameters on doping contrast of Si p?n junctions in a FEG-SEM}},
publisher = {{Elsevier BV}},
url = {{http://dx.doi.org/10.1016/j.mee.2004.03.080 }},
year = {{2004}},
month = {{6}},
author = {{KAZEMIAN P}},
doi = {{10.1016/j.mee.2004.03.080}},
volume = {{73-74}},
journal = {{Microelectronic Engineering}},
pages = {{948-953}},
note = {{Accessed on 2025/03/16}}}