@article{article, title = {{Effect of experimental parameters on doping contrast of Si p?n junctions in a FEG-SEM}}, publisher = {{Elsevier BV}}, url = {{http://dx.doi.org/10.1016/j.mee.2004.03.080 }}, year = {{2004}}, month = {{6}}, author = {{KAZEMIAN P}}, doi = {{10.1016/j.mee.2004.03.080}}, volume = {{73-74}}, journal = {{Microelectronic Engineering}}, pages = {{948-953}}, note = {{Accessed on 2025/03/16}}}